Reference number
ISO 15632:2021
ISO 15632:2021
© ISO 2024
International Standard
ISO 15632:2021
Microbeam analysis — Selected instrumental performance parameters for the specification and checking of energy-dispersive X-ray spectrometers (EDS) for use with a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA)
Edition 3
2021-02
2021-02
Resumen
This document defines the most important quantities that characterize an energy-dispersive X‑ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2] and ASTM E1508[3] and is outside the scope of this document.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2021-02Etapa: Norma Internacional publicada [60.60]
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Edición: 3Número de páginas: 13
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Comité Técnico :ISO/TC 202ICS :71.040.99
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Ciclo de vida
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Anteriormente
RetiradaISO 15632:2012
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Ahora