International Standard
ISO 17973:2024
Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
Reference number
ISO 17973:2024
ISO 17973:2024
Edition 3
2024-07
2024-07
© ISO 2024
Resumen
This document specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. This document also specifies a method for establishing a calibration schedule.
It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.
Informaciones generales
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Estado: PublicadoFecha de publicación: 2024-07Etapa: Norma Internacional publicada [60.60]
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Edición: 3Número de páginas: 11
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Comité Técnico :ISO/TC 201/SC 7ICS :71.040.40
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Ciclo de vida
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Anteriormente
RetiradaISO 17973:2016
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Ahora