This standard was last reviewed and confirmed in 2018.
Therefore this version remains current.
Abstract
PreviewISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
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Status: PublishedPublication date: 2013-10
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Edition: 1Number of pages: 28
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Technical Committee: ISO/TC 213 Dimensional and geometrical product specifications and verification
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- ICS :
- 17.040.20 Properties of surfaces
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| Format | Language | |
|---|---|---|
| std 1 145 | PDF + ePub | |
| std 2 145 | Paper |
- CHF145
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