ISO 22278:2020
p
ISO 22278:2020
73015

Abstract  Preview

This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.


General information 

  •  :  Published
     : 2020-08
  •  : 1
     : 29
  •  : ISO/TC 206 Fine ceramics
  •  :
    81.060.30 Advanced ceramics

Buy this standard

en
Format Language
std 1 138 PDF + ePub
std 2 138 Paper
  • CHF138

Got a question?

Check out our FAQs

Customer care
+41 22 749 08 88

Opening hours:
Monday to Friday - 09:00-12:00, 14:00-17:00 (UTC+1)

Keep up to date with ISO

Sign up to our newsletter for the latest news, views and product information.