Abstract

ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.


General information 

  • Status
     :  Withdrawn
    Publication date
     : 2003-07
  • Edition
     : 1
    Number of pages
     : 14
  • Technical Committee
     : ISO/TC 112 Vacuum technology
  • ICS
     :
    23.160 Vacuum technology

Life cycle


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