Abstract
ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.
General information
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Status: PublishedPublication date: 2005-11Stage: International Standard confirmed [90.93]
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Edition: 1Number of pages: 9
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Technical Committee :ISO/TC 206ICS :81.060.30
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