This standard was last reviewed and confirmed in 2018. Therefore this version remains current.
ISO 25178-603:2013 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.
Status: PublishedPublication date: 2013-10
Edition: 1Number of pages: 28
Technical Committee: ISO/TC 213 Dimensional and geometrical product specifications and verification
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