Status : Published (Under review)

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Abstract

ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate.

ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.

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General information

  • Status
     : Published
    Publication date
     : 2014-04
    Stage
    : Close of review [90.60]
  • Edition
     : 2
    Number of pages
     : 20
  • Technical Committee :
    ISO/TC 202/SC 1
    ICS :
    37.020  01.040.37 
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