ISO 19606:2017 describes a method to evaluate the adequateness of a probe tip for fine-ceramic thin-film surface roughness measurements by atomic force microscopy, of surfaces with an arithmetical mean roughness, Ra, in the range of about 1 nm to 30 nm and a mean width of roughness profile elements, RSm, in the range of about 0,04 μm to 2,5 μm.
Status: PublishedPublication date: 2017-02
Edition: 1Number of pages: 24
Technical Committee: ISO/TC 206 Fine ceramics
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