Abstract

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This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges.

This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.


General information 

  • Status
     :  Published
    Publication date
     : 2019-01
  • Edition
     : 1
    Number of pages
     : 16
  • Technical Committee
     : ISO/TC 112 Vacuum technology
  • ICS
     :
    23.160 Vacuum technology

Sustainable Development Goals

This standard contributes to the following Sustainable Development Goal:

9
Industry, Innovation and Infrastructure

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