Abstract
PreviewThis document specifies a method for measuring the mass resolution in SIMS, and how to compare the mass resolution between different instruments (e.g. TOF-SIMS, Magnetic SIMS, Quadrupole SIMS, Fourier Transform SIMS, etc.) by considering the peak shapes.
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Status: PublishedPublication date: 2022-04
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Edition: 1Number of pages: 15
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- ICS :
- 71.040.40 Chemical analysis
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- CHF92
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