ISO 18516:2019
2019-01
Abstract
This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are
— the straight edge method;
— the narrow line method;
— the grating method.
This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.
General information
-
Status: PublishedPublication date: 2019-01Stage: International Standard confirmed [90.93]
-
Edition: 2Number of pages: 53
-
Technical Committee :ISO/TC 201/SC 2ICS :71.040.40
- RSS updates
Life cycle
-
Previously
WithdrawnISO 18516:2006
-
Now
