Reference number
ISO 11952:2014
© ISO 2025
ISO 11952:2014
Surface chemical analysis — Scanning-probe microscopy — Determination of geometric quantities using SPM: Calibration of measuring systems
Edition 1
2014-05
Withdrawn
Withdrawn (Edition 1, 2014)

Abstract

ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.

General information

  • Status
     : Withdrawn
    Publication date
     : 2014-05
    Stage
    : Withdrawal of International Standard [95.99]
  • Edition
     : 1
    Number of pages
     : 58
  • Technical Committee :
    ISO/TC 201/SC 9
    ICS :
    71.040.40 
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