This standard has been revised by ISO 11952:2019
Abstract
ISO 11952:2014 specifies methods for characterizing and calibrating the scan axes of scanning-probe microscopes for measuring geometric quantities at the highest level. It is applicable to those providing further calibrations and is not intended for general industry use, where a lower level of calibration might be required.
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Status: WithdrawnPublication date: 2014-05
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Edition: 1Number of pages: 58
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- ICS :
- 71.040.40 Chemical analysis
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