Reference number
ISO 23216:2021
ISO 23216:2021
© ISO 2024
International Standard
ISO 23216:2021
Carbon based films — Determination of optical properties of amorphous carbon films by spectroscopic ellipsometry
Edition 1
2021-05
2021-05
Abstract
This document specifies spectroscopic ellipsometry for the determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.
It is applicable to amorphous carbon films deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others.
It does not apply to carbon films modified with metals or silicon, amorphous carbon films that have a gradient of composition/property in the thickness, paints and varnishes.
General information
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Status: PublishedPublication date: 2021-05Stage: International Standard published [60.60]
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Edition: 1Number of pages: 7
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Technical Committee :ISO/TC 107ICS :25.220.99
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