ISO/AWI 23131-3
Ellipsometry — Part 3: Transparent single layer model
Reference number
ISO/AWI 23131-3
Edition 1
© ISO 2024
Working draft
Under development
A working group has prepared a draft.

Abstract

This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.

General information

  • Status
     : Under development
    Stage
    : New project registered in TC/SC work programme [20.00]
  • Edition
     : 1
  • Technical Committee :
    ISO/TC 107
  • RSS updates

Life cycle

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