Abstract
This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
General information
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Status: Under developmentStage: New project registered in TC/SC work programme [20.00]
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Edition: 2
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Technical Committee :ISO/TC 213
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Life cycle
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Previously
PublishedISO 25178-607:2019
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Now