Reference number
ISO 24639:2022
ISO 24639:2022
© ISO 2024
International Standard
ISO 24639:2022
Microbeam analysis — Analytical electron microscopy — Calibration procedure of energy scale for elemental analysis by electron energy loss spectroscopy
Edition 1
2022-07
2022-07
Résumé
This document specifies a calibration procedure of the energy step and the energy scale for electron energy loss spectroscopy in (scanning) transmission electron microscopes to an uncertainty of ±3 % for the energy range 0 eV to 3 000 eV.
This document is intended for electron energy loss spectroscopy with transmitted electrons through sufficiently electron transparent samples, such as a thin foil sample, and is not designed for backscattered electrons from a bulk sample.
Informations générales
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État actuel: PubliéeDate de publication: 2022-07Stade: Norme internationale publiée [60.60]
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Edition: 1
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Comité technique :ISO/TC 202/SC 3ICS :71.040.50
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